Open AccessImproved method for measuring photoacid generator kinetics in polymer thin films using normalized interdigitated electrode capacitance data
Author(s) -
Cody M. Berger,
Clifford L. Henderson
Publication year - 2004
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.1755219
Subject(s) - capacitance , photoresist , electrode , trifluoromethanesulfonate , polymer , materials science , reaction rate constant , analytical chemistry (journal) , resist , polycarbonate , normalization (sociology) , polymer chemistry , kinetics , chemistry , composite material , physics , chromatography , organic chemistry , catalysis , sociology , anthropology , layer (electronics) , quantum mechanics
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