Probing the electronic structures of III–V-nitride semiconductors by x-ray photoelectron spectroscopy
Author(s) -
T. S. Lay,
Watson Kuo,
L. P. Chen,
YingHuang Lai,
W. H. Hung,
J. S. Wang,
J. Y.,
D. K. Shih,
H. H. Lin
Publication year - 2004
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.1735802
Subject(s) - x ray photoelectron spectroscopy , materials science , molecular beam epitaxy , binding energy , synchrotron radiation , nitride , analytical chemistry (journal) , spectral line , electronic structure , crystallography , epitaxy , chemistry , atomic physics , nuclear magnetic resonance , nanotechnology , optics , computational chemistry , physics , layer (electronics) , chromatography , astronomy
The electronic structures of III–V-nitride semiconductors, including InGaAsN, GaAsN, and InAsN grown by molecular beam epitaxy, were investigated by high-resolution x-ray photoelectron spectroscopy using synchrotron radiation beam and low energy Ar+ sputtering. The N(1s) core-level photoelectron spectra show a single peak with a binding energy (Eb)∼398.0 eV of N–Ga bonding for GaAsN sample. For the InAsN samples, a single N(1s) peak at Eb∼397.0 eV of N–In bonding is observed. For the InGaAsN samples, the N(1s) spectra exhibit two peaks with a major component corresponding to N–In bonding, and a minor one to N–Ga bonding. The integrated N(1s) intensity of N–In bonding has a higher value than that of N–Ga bonding, in spite of the lower mole fraction of In for the InGaAsN sample. The data indicate that N has a bonding configuration with In-rich nearest neighbors in the InGaAsN samples.
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