Open AccessDevelopment of improved photosensitive polycarbonate systems for the fabrication of microfluidic devices
Author(s) -
Celesta E. White,
Clifford L. Henderson
Publication year - 2003
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.1622934
Subject(s) - microelectronics , microfluidics , fabrication , polycarbonate , materials science , nanotechnology , fluidics , microelectromechanical systems , polymer , electrical engineering , engineering , composite material , medicine , alternative medicine , pathology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom