Open AccessStructure and growth of basal and random oriented MoSx coatings deposited by magnetron sputtering
Author(s) -
Xiaoling Zhang,
W. Lauwerens,
Jiawen He,
JeanPierre Célis
Publication year - 2003
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.1545757
Subject(s) - microstructure , materials science , sputter deposition , coating , transmission electron microscopy , cavity magnetron , substrate (aquarium) , sputtering , scanning electron microscope , deposition (geology) , argon , orientation (vector space) , composite material , crystallography , thin film , nanotechnology , chemistry , geometry , paleontology , oceanography , mathematics , organic chemistry , sediment , geology , biology
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