Influence of the elemental composition and crystal structure on the vacuum properties of Ti–Zr–V nonevaporable getter films | Zendy

C. Benvenuti | Zendy; Paolo Chiggiato | Zendy; A. Mongelluzzo | Zendy; A.E Prodromides | Zendy; V.L. Ruzinov | Zendy; C. Scheuerlein | Zendy; M. Taborelli | Zendy; F. Lévy | Zendy

Open Access

Influence of the elemental composition and crystal structure on the vacuum properties of Ti–Zr–V nonevaporable getter films

Author(s) -

C. Benvenuti,

Paolo Chiggiato,

A. Mongelluzzo,

A.E Prodromides,

V.L. Ruzinov,

C. Scheuerlein,

M. Taborelli,

F. Lévy

Publication year - 2001

Publication title -

journal of vacuum science and technology a vacuum surfaces and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/1.1414122

Subject(s) - getter , auger electron spectroscopy , materials science , sputtering , chemical composition , analytical chemistry (journal) , substrate (aquarium) , saturation (graph theory) , surface roughness , spectroscopy , auger , thin film , composite material , chemistry , optoelectronics , nanotechnology , atomic physics , physics , oceanography , organic chemistry , mathematics , chromatography , combinatorics , quantum mechanics , geology , nuclear physics

Nonevaporable thin film getters based on the elements of the fourth and fifth columns of the periodic table were deposited by sputtering. Among the some 20 alloys studied to date, the lowest activation temperature (about 180 °C for a 24 h heating) was found in the Ti–Zr–V system with a well-defined composition range. Characterization of the activation behavior of such Ti–Zr–V films is presented. The evolution of the surface chemical composition during activation is monitored by Auger electron spectroscopy and the functional properties are evaluated by pumping speed measurements. The pumping speed characteristics are quite similar to those already measured for commercially available nonevaporable getter materials, except for the much lower saturation coverage for CO. This inconvenience, which is due to the smooth surface structure of these films, can be counteracted by increasing the roughness of the substrate.

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