An Ionization Gauge Using a Channel Electron Multiplier for Pressures Below 10−12 Torr | Zendy

D. Blechschmidt | Zendy

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An Ionization Gauge Using a Channel Electron Multiplier for Pressures Below 10−12 Torr

Author(s) -

D. Blechschmidt

Publication year - 1973

Publication title -

journal of vacuum science and technology

Language(s) - English

Resource type - Journals

eISSN - 2331-1754

pISSN - 0022-5355

DOI - 10.1116/1.1317069

Subject(s) - torr , ionization , pressure measurement , electron multiplier , gauge (firearms) , electron , atomic physics , chemistry , physics , ion , analytical chemistry (journal) , materials science , nuclear physics , thermodynamics , quantum mechanics , chromatography , metallurgy

Since new techniques to achieve pressures of below 10/sup -12/ Torr have been developed, gauges with an appropriate low pressure limit are required. Channeltrons, with their high gain, seem to be the best means to construct gauges with high sensitivity. In this paper a new ionisation gauge using a channeltron has been described. (15 refs)

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