Open AccessOn Uniformity of Film Thickness on Rotating Substrates
Author(s) -
B. S. Ramprasad,
T. S. Radha,
M. Ramakrishna Rao
Publication year - 1972
Publication title -
journal of vacuum science and technology
Language(s) - English
Resource type - Journals
eISSN - 2331-1754
pISSN - 0022-5355
DOI - 10.1116/1.1317017
Subject(s) - materials science , composite material
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