Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode | Zendy

Karim M. Masri | Zendy; Mohammad I. Younis | Zendy

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Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode

Author(s) -

Karim M. Masri,

Mohammad I. Younis

Publication year - 2014

Publication title -

king abdullah university of science and technology repository (king abdullah university of science and technology)

Language(s) - English

Resource type - Conference proceedings

DOI - 10.1115/detc2014-34923

Subject(s) - microbeam , electrode , mode (computer interface) , admittance , galerkin method , materials science , amplifier , dynamics (music) , acoustics , optics , physics , optoelectronics , finite element method , computer science , electrical impedance , cmos , quantum mechanics , thermodynamics , operating system

We present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors

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