Effects of Design Parameters on the Sensitivity of a Micro-Cantilever Based Biosensor

Piezo-resistive actuation of a microcantilever induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces exerted is small, increasing the sensitivity of the microcantilever becomes critical. In this paper, we are considering to achieve this by geometric variation of the cantilever. The sensitivity of the cantilever was improved so that the device can sense the presence of antigen even if the magnitude of surface-stresses over the microcantilever was very small. We consider a `T-shaped' cantilver that eliminates the disadvantages while improving the sensitivity simultaneously. Simulations for validation have been performed using Intellisuite software (a MEMS design and simulation package). The simulations reveal that the T-shaped microcantilver is almost as sensitive as a thin cantilever and has relatively very low buckling effect. Simulations also reveal that with an increase in thickness of the cantilever, there is a proportional decrease in the sensitivity. This paper presents an analytical modeling and simulation studies of a piezoresistive cantilever used as MEMS based biosensor for the detection of cardiac markers. Diagnosis of Myocardial Infarction was achieved by the nanomechanical deflection of the microcantilever due to adsorption of the Troponin I complex. The deflection of the microcantilever was measured in terms of the piezoresistive changes by implanting boron at the anchor point where there is maximum strain due to the adsorption of the analyte molecules. The biochemical interactions between the Cardiac Troponin I (cTnl) complex and the immobilized antibodies would cause change in resistance of the piezoresistor integrated at the anchor point. A ‘T’ shaped microcantilever design was proposed for the study. The distal end of the device was coated with gold. The sensitivity of the cantilever was improved so that the device can sense the presence of antigen even if the magnitude of surface-stresses over the microcantilever was very small. To obtain an application specific optimum design parameter and predict the cantilever performance. The miniaturization of the cantilever-based biosensor leads to significant advantages in the absolute device sensitivity.