Open AccessHigh-Frequency, Silicon-Based Ultrasonic Nozzles Using Multiple Fourier Horns
Author(s) -
S.C. Tsaï,
YuLin Song,
T.K. Tseng,
Yuan F. Chou,
Wei J. Chen,
Chen S. Tsai
Publication year - 2004
Publication title -
ieee transactions on ultrasonics ferroelectrics and frequency control
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.159
H-Index - 136
eISSN - 1525-8955
pISSN - 0885-3010
DOI - 10.1109/tuffc.2004.1295407
Subject(s) - nozzle , acoustics , materials science , vibration , resonator , amplitude , transducer , ultrasonic sensor , optics , engineering , physics , optoelectronics , mechanical engineering
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