Open AccessParticle Collecting in a 13.56 MHz Radiofrequency Methane Discharge
Author(s) -
Véronique MassereauGuilbaud,
Isabelle GéraudGrenier,
André Plain
Publication year - 2011
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
DOI - 10.1109/tps.2011.215906
Subject(s) - methane , particle (ecology) , environmental science , materials science , environmental chemistry , chemistry , geology , organic chemistry , oceanography
International audienceRadiofrequency methane plasmas are widely used for deposition of amorphous hydrogenated coatings a-C:H in PECVD reactors. According to our experimental conditions, particles are also generated in the plasma. The study of the chemical nature of these particles requires a sufficient quantity to be collected at the end of the experiment. We show that a modification of the electrical field lines above the grounded electrode improves particle collecting
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