Experimental study of nanoparticle formation dynamics in HMDSO-Ar asymmetric capacitively-coupled radiofrequency plasma with application to deposition of nanocomposite layers | Zendy

V. Garofano | Zendy; L. Stafford | Zendy; J. Gorka | Zendy; F. Gaboriau | Zendy; B. Despax | Zendy; J. Boulon | Zendy; C. Joblin | Zendy; K. Demyk | Zendy; K. Makasheva | Zendy

Open Access

Experimental study of nanoparticle formation dynamics in HMDSO-Ar asymmetric capacitively-coupled radiofrequency plasma with application to deposition of nanocomposite layers

Author(s) -

V. Garofano,

L. Stafford,

J. Gorka,

F. Gaboriau,

B. Despax,

J. Boulon,

C. Joblin,

K. Demyk,

K. Makasheva

Publication year - 2016

Publication title -

2016 ieee nanotechnology materials and devices conference (nmdc)

Language(s) - English

Resource type - Conference proceedings

ISBN - 978-1-5090-4352-1

DOI - 10.1109/nmdc.2016.7777173

Subject(s) - aerospace , bioengineering , components, circuits, devices and systems , engineered materials, dielectrics and plasmas , fields, waves and electromagnetics , photonics and electrooptics , power, energy and industry applications

Rational engineering of nanocomposite thin layers, deposited in reactive plasmas, requires knowledge on the plasma behaviour in order to design the structural and electrical properties of the deposits. It opens the way for transition from material level of development to system level of applications. This work presents experimental study of nanoparticle formation dynamics in the plasma gas phase, along with the plasma parameters, linked to the composition of the synthesized nanoparticles before their incorporation in plasma deposits. It is found that by controlling the plasma electron temperature and density one can finely tune the nanoparticle composition as a function of reactive gas mixture.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research