Open AccessA Large Range of Motion 3D MEMS Scanner With Five Degrees of Freedom
Author(s) -
Lawrence Barrett,
Thomas Stark,
Jeremy Reeves,
Richard Lally,
Alexander Stange,
Corey Pollock,
Matthias Imboden,
David J. Bishop
Publication year - 2019
Publication title -
journal of microelectromechanical systems
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.596
H-Index - 143
eISSN - 1941-0158
pISSN - 1057-7157
DOI - 10.1109/jmems.2018.2886653
Subject(s) - scanner , microelectromechanical systems , actuator , shutter , process (computing) , micrometer , degrees of freedom (physics and chemistry) , materials science , computer science , capacitive sensing , optics , acoustics , nanotechnology , physics , engineering , electrical engineering , artificial intelligence , quantum mechanics , operating system