
Etching of crystals. Theory, experiment, and application by K. Sangwal
Author(s) -
Heimann R. B.
Publication year - 1988
Publication title -
acta crystallographica section a
Language(s) - English
Resource type - Journals
eISSN - 1600-5724
pISSN - 0108-7673
DOI - 10.1107/s0108767387007384
Subject(s) - materials science , etching (microfabrication) , crystallography , theoretical physics , nanotechnology , physics , chemistry , layer (electronics)