Colloquium:Reactive plasmas as a versatile nanofabrication tool | Zendy

Kostya Ostrikov | Zendy

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Colloquium:Reactive plasmas as a versatile nanofabrication tool

Author(s) -

Kostya Ostrikov

Publication year - 2005

Publication title -

reviews of modern physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 24.877

H-Index - 363

eISSN - 1538-4527

pISSN - 0034-6861

DOI - 10.1103/revmodphys.77.489

Subject(s) - nanolithography , nanotechnology , plasma , physics , silicon , materials science , optoelectronics , fabrication , nuclear physics , medicine , alternative medicine , pathology

The underlying physics of the application of low-temperature, low-pressure reactive plasmas in various nanoassembly processes is described. From the viewpoint of the "cause and effect" approach, this Colloquium focuses on the benefits and challenges of using plasma-based systems in nanofabrication of nanostructured silicon films, low-dimensional semiconducting quantum structures, ordered carbon nanotip arrays, highly crystalline TiO2 coatings, and nanostructured hydroxyapatite bioceramics. Other examples and future prospects of plasma-aided nanofabrication are also discussed. © 2005 The American Physical Society

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