Ion-Beam Sculpting Time Scales | Zendy

Derek Stein | Zendy; Jiali Li | Zendy; J. A. Golovchenko | Zendy

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Ion-Beam Sculpting Time Scales

Author(s) -

Derek Stein,

Jiali Li,

J. A. Golovchenko

Publication year - 2002

Publication title -

physical review letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 3.688

H-Index - 673

eISSN - 1079-7114

pISSN - 0031-9007

DOI - 10.1103/physrevlett.89.276106

Subject(s) - ion beam , ion , beam (structure) , nanoscopic scale , dynamics (music) , materials science , phenomenological model , atomic physics , focused ion beam , ion transporter , physics , optics , nanotechnology , condensed matter physics , quantum mechanics , acoustics

A study of ion sculpting dynamics in SiO2 and SiN using periodically pulsed ion beams reveals material transport that depends strongly on the time structure of the pulsed beams. It is found that significant nanoscale matter transport can occur over second long time scales after the ion beam has been extinguished. A simple phenomenological model described the dynamics of ion beam sculpting in terms of two material time scales. The model accounts for the surprising observation of enhanced matter transport affected by pulsed ion beams over continuous ion beam exposure.

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