Effect of an internal rotating current on low-frequency inductively coupled plasmas | Zendy

E. L. Tsakadze | Zendy; Kostya Ostrikov | Zendy; Xu | Zendy; Ian Rees Jones | Zendy; R. G. Storer | Zendy; Minghai Yu | Zendy; S. Lee | Zendy

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Effect of an internal rotating current on low-frequency inductively coupled plasmas

Author(s) -

E. L. Tsakadze,

Kostya Ostrikov,

Xu,

Ian Rees Jones,

R. G. Storer,

Minghai Yu,

S. Lee

Publication year - 2001

Publication title -

physical review. e, statistical physics, plasmas, fluids, and related interdisciplinary topics

Language(s) - English

Resource type - Journals

eISSN - 1095-3787

pISSN - 1063-651X

DOI - 10.1103/physreve.63.046402

Subject(s) - inductively coupled plasma , plasma , physics , atomic physics , electromagnetic field , current (fluid) , current density , electron , power balance , power (physics) , computational physics , nuclear physics , quantum mechanics , thermodynamics

The effects of an inductively rotating current were observed on low-frequency inductively coupled plasmas. The spatial distribution of electromagnetic fields was investigated in a cylindrical metallic chamber filled with dense plasma. The distribution of the magnetic field in plasma chamber was observed for rarefied and dense plasmas. The plasma was assumed as uniform in the electromagnetic fields. The results showed the plasma density increased with power and the electron density increased with pressure

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