Open AccessThree-dimensional kinetic Monte Carlo simulations of cubic transition metal nitride thin film growth
Author(s) -
Florin Nita,
Cédric Mastail,
G. Abadias
Publication year - 2016
Publication title -
physical review. b./physical review. b
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.78
H-Index - 465
eISSN - 2469-9969
pISSN - 2469-9950
DOI - 10.1103/physrevb.93.064107
Subject(s) - kinetic monte carlo , faceting , materials science , surface diffusion , kinetic energy , microstructure , monte carlo method , sputter deposition , island growth , anisotropy , thin film , diffusion , condensed matter physics , surface energy , nitride , sputtering , chemical physics , nanotechnology , thermodynamics , epitaxy , physics , optics , layer (electronics) , composite material , chemistry , statistics , mathematics , adsorption , quantum mechanics
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