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Early stage of Ge growth on Si(001) vicinal surfaces with an 8° miscut along[110]
Author(s) -
P. D. Szkutnik,
A. Sgarlata,
A. Balzarotti,
Nunzio Motta,
A. Ronda,
I. Berbézier
Publication year - 2007
Publication title -
physical review b
Language(s) - English
Resource type - Journals
eISSN - 1538-4489
pISSN - 1098-0121
DOI - 10.1103/physrevb.75.033305
Subject(s) - vicinal , scanning tunneling microscope , metastability , heterojunction , materials science , substrate (aquarium) , nucleation , deposition (geology) , crystallography , condensed matter physics , physics , nanotechnology , optoelectronics , chemistry , geology , thermodynamics , quantum mechanics , paleontology , oceanography , sediment
The atomistic pathway towards the growth of semiconductor heterostructures on vicinal surfaces is investigated in a special experiment. A step-by-step study of the early stages of Ge deposition at T=600 degrees Celsius on a 8 degrees off Si(001) surface miscut along [110] is performed by scanning tunneling microscopy (STM). The microscopic processes occurring during growth are identified. Highly resolved STM images show how double height steps, which characterize the clean substrate, evolve by a step flow process generated by ad-dimer chains located at specific positions. This process leads to the formation of metastable single domains until the development of {105} faceted ripples extending along the whole surface in the miscut direction

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