Modeling the Lateral Wet Oxidation ofAlxGa1−xAsinto Arbitrary Mesa Geometries | Zendy

K. Alfaro-Bittner | Zendy; René S. Rojas | Zendy; Gaël Lafleur | Zendy; S. Calvez | Zendy; Guilhem Almuneau | Zendy; Marcel G. Clerc | Zendy; S. Barbay | Zendy

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Modeling the Lateral Wet Oxidation ofAlxGa1−xAsinto Arbitrary Mesa Geometries

Author(s) -

K. Alfaro-Bittner,

René S. Rojas,

Gaël Lafleur,

S. Calvez,

Guilhem Almuneau,

Marcel G. Clerc,

S. Barbay

Publication year - 2019

Publication title -

physical review applied

Language(s) - Spanish

Resource type - Journals

SCImago Journal Rank - 1.883

H-Index - 75

eISSN - 2331-7043

pISSN - 2331-7019

DOI - 10.1103/physrevapplied.11.044067

Subject(s) - algorithm , scroll , geometry , diffusion , materials science , physics , computer science , mathematics , thermodynamics , mechanical engineering , engineering

1 Instituto de Física, Pontificia Universidad Católica de Valparaíso, Casilla 4059, Valparaíso, Chile 2 LAAS-CNRS, Université de Toulouse, CNRS, Toulouse, France 3 Departamento de Física and Millenium Institute for Research in Optics, Facultad de Ciencias Físicas y Matemáticas, Universidad de Chile, Santiago, Chile 4 Centre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Université Paris-Saclay, Palaiseau, France

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