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Extensive development of micro/nano-electromechanical systems (MEMS/NEMS) has resulted in technologies that exhibit excellent performance over a wide range of applications in both applied (e.g. sensing, imaging, timing and signal processing) and fundamental sciences (e.g. quantum-level problems). Many of these outstanding applications benefit from resonance phenomena by employing micro/nanoscale mechanical resonators often fabricated into a beam-, membrane- or plate-type structure. During the early development stage, one of the vibrational modes (typically the fundamental mode) of a resonator is considered in the design and application. In the past decade, however, there has been a growing interest in using more than one vibrational mode for the enhanced functionality of MEMS/NEMS. In this paper, we review recent research efforts to investigate the nonlinear coupling and energy transfers between multiple modes in micro/nano-mechanical resonators, focusing especially on intermodal coupling, internal resonance and synchronization. This article is part of the theme issue ‘Nonlinear energy transfer in dynamical and acoustical systems’.

philosophical transactions - royal society. mathematical, physical and engineering sciences/philosophical transactions - royal society. mathematical, physical and engineering sciences

Nonlinear couplings and energy transfers in micro- and nano-mechanical resonators: intermodal coupling, internal resonance and synchronization