Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

The development of terahertz (THz) applications is slowed down by the availability of affordable, easy-to-use and highly sensitive detectors. CEA-Leti took up this challenge by tailoring the mature infrared (IR) bolometer technology for optimized THz sensing. The key feature of these detectors relies on the separation between electromagnetic absorption and the thermometer. For each pixel, specific structures of antennas and a resonant quarter-wavelength cavity couple efficiently the THz radiation on a broadband range, while a central silicon microbridge bolometer resistance is read out by a complementary metal oxide semiconductor circuit. 320×240 pixel arrays have been designed and manufactured: a better than 30 pW power direct detection threshold per pixel has been demonstrated in the 2-4 THz range. Such performance is expected on the whole THz range by proper tailoring of the antennas while keeping the technological stack largely unchanged. This paper gives an overview of the developed bolometer-based technology. First, it describes the technology and reports the latest performance characterizations. Then imaging demonstrations are presented, such as real-time reflectance imaging of a large surface of hidden objects and THz time-domain spectroscopy beam two-dimensional profiling. Finally, perspectives of camera integration for scientific and industrial applications are discussed.