Soft X-ray emission spectroscopy study of characteristic bonding states and its distribution of amorphous carbon-nitride (a-CNx) films | Zendy

Shingo Ishii | Zendy; Masami Terauchi | Zendy; Yohei Sato | Zendy; Naoyuki Tamura | Zendy; Masami Aono | Zendy; Hiroshi Abe | Zendy

Open Access

Soft X-ray emission spectroscopy study of characteristic bonding states and its distribution of amorphous carbon-nitride (a-CNx) films

Author(s) -

Shingo Ishii,

Masami Terauchi,

Yohei Sato,

Naoyuki Tamura,

Masami Aono,

Hiroshi Abe

Publication year - 2018

Publication title -

microscopy

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.545

H-Index - 52

eISSN - 2050-5701

pISSN - 2050-5698

DOI - 10.1093/jmicro/dfy024

Subject(s) - materials science , analytical chemistry (journal) , amorphous carbon , amorphous solid , carbon nitride , nitride , nitrogen , carbon fibers , electrical resistivity and conductivity , chemical bond , crystallography , chemistry , nanotechnology , composite material , layer (electronics) , organic chemistry , photocatalysis , composite number , catalysis , engineering , electrical engineering

Soft X-ray emission spectroscopy based on electron microscopy was applied to investigate bonding electron states of amorphous carbon nitride (a-CNx) films with different nitrogen contents of x. Carbon K-emission spectrum showed characteristic intensity distribution of not only sp2 bonding but also sp3 bonding. The a-CNx film with lager x, which has a larger macroscopic electric resistivity, shows a larger content of the carbon sp3: C-C bonding signal. Furthermore, the dependence of spectral intensity distribution on x suggests the presence of sp2: C-N and sp3: C-N bonding. Those results show that the relation between macroscopic electrical resistivity of a-CNx film and its nitrogen content is because of the decrease of sp2: C-C bonding and the formation of sp2: C-N and sp3: C-C and C-N bonding conformation induced by an introduction of nitrogen atoms. Spatial variation of a signal ratio of sp3/sp2 was visualized and was confirmed as a relation between sp3 boding amount and nitrogen content x.

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