Three-dimensional STEM for observing nanostructures | Zendy

Masanari Koguchi | Zendy; Hiroshi Kakibayashi | Zendy; Ruriko Tsuneta | Zendy; Masahiro Yamaoka | Zendy; T. Niino | Zendy; Nobuyuki Tanaka | Zendy; Kiwamu Kase | Zendy; M. Iwaki | Zendy

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Three-dimensional STEM for observing nanostructures

Author(s) -

Masanari Koguchi,

Hiroshi Kakibayashi,

Ruriko Tsuneta,

Masahiro Yamaoka,

T. Niino,

Nobuyuki Tanaka,

Kiwamu Kase,

M. Iwaki

Publication year - 2001

Publication title -

microscopy

Language(s) - Uncategorized

Resource type - Journals

SCImago Journal Rank - 0.545

H-Index - 52

eISSN - 2050-5701

pISSN - 2050-5698

DOI - 10.1093/jmicro/50.3.235

Subject(s) - nanostructure , scanning transmission electron microscopy , materials science , focused ion beam , transmission electron microscopy , semiconductor , rotation (mathematics) , scanning electron microscope , copper , optics , nanotechnology , optoelectronics , ion , chemistry , physics , composite material , metallurgy , geometry , mathematics , organic chemistry

A new scanning transmission electron microscope has been developed for three-dimensional (3D) observations of nanostructures. Using double spherical fulcra, accurate eucentric rotation was achieved. Cylindrical specimens for 3D-observation were prepared by a microsampling technique using a focused ion beam. Copper via-holes of a semiconductor memory device and ZnO particles were observed by the 3D-STEM from different directions, and 3D-data of the ZnO particles were successfully reconstructed in a topography mode.

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