Progress in aberration-corrected scanning transmission electron microscopy | Zendy

Niklas Dellby | Zendy; O. L. Krivanek | Zendy; P.D. Nellist | Zendy; P. E. Batson | Zendy; Andrew R. Lupini | Zendy

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Progress in aberration-corrected scanning transmission electron microscopy

Author(s) -

Niklas Dellby,

O. L. Krivanek,

P.D. Nellist,

P. E. Batson,

Andrew R. Lupini

Publication year - 2001

Publication title -

microscopy

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.545

H-Index - 52

eISSN - 2050-5701

pISSN - 2050-5698

DOI - 10.1093/jmicro/50.3.177

Subject(s) - scanning transmission electron microscopy , optics , spherical aberration , contrast transfer function , microscope , resolution (logic) , point (geometry) , dark field microscopy , materials science , conventional transmission electron microscope , physics , scanning electron microscope , microscopy , computer science , mathematics , geometry , artificial intelligence , lens (geology)

A new corrector of spherical aberration (C(S)) for a dedicated scanning transmission electron microscope (STEM) is described and its results are presented. The corrector uses strong octupoles and increases C(C) by only 0.2 mm relative to the uncorrected microscope. Its overall stability is greatly improved compared to our previous design. It has achieved a point-to-point resolution of 1.23 A in high-angle annular dark field images at 100 kV. It has also increased the current available in a 1.3 A-sized probe by about a factor of ten compared to existing STEMs. Its operation is greatly assisted by newly developed autotuning software which measures all the aberration coefficients up to fifth order in less than one minute. We conclude by discussing the present limits of aberration-corrected STEM, and likely future developments.

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