Open AccessMicro-fabrication of Flexible Coils with Copper Filled Through Polymer Via Structures
Author(s) -
Qing–Ling Zhu,
A. Toda,
Y Zhang,
Toshihiro Itoh,
Ryutaro Maeda
Publication year - 2013
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/476/1/012032
Subject(s) - electromagnetic coil , fabrication , materials science , microelectromechanical systems , copper , void (composites) , polymer , composite material , optoelectronics , electrical engineering , metallurgy , engineering , medicine , alternative medicine , pathology