Open AccessImproving Resonance Characteristics of Gas Sensors by Chemical Etching of Quartz Plates
Author(s) -
Z. Raicheva,
В. Георгиева,
А. А. Гречников,
V. Gadjanova,
T Angelov,
L. Vergov,
Yuliyan Lazarov
Publication year - 2012
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/398/1/012046
Subject(s) - quartz , etching (microfabrication) , isotropic etching , materials science , resonance (particle physics) , optoelectronics , nanotechnology , composite material , physics , atomic physics , layer (electronics)