Open AccessLiGA Research and Service at CAMD
Author(s) -
Jost Goettert,
Proyag Datta,
Yohannes M. Desta,
Yoonyoung Jin,
Zhen Ling,
Varshni Singh
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/34/1/151
Subject(s) - liga , resist , service (business) , molding (decorative) , variety (cybernetics) , fabrication , engineering drawing , electroplating , lithography , computer science , materials science , manufacturing engineering , engineering , mechanical engineering , nanotechnology , optoelectronics , medicine , alternative medicine , pathology , layer (electronics) , artificial intelligence , economy , economics