Open AccessSolidly mounted resonators aging under harsh environmental conditions
Author(s) -
B. Ivira,
R.y Fillit,
F. Ndagijimana,
Ph. Benech,
J. BousseySaïd,
G. Parat,
P. Ancey
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/34/1/110
Subject(s) - resonator , materials science , engineering physics , environmental science , optoelectronics , electrical engineering , engineering
International audienceA contribution to reliability studies of Solidly Mounted Resonators (SMR) submitted to harsh environments such as temperature and humidity is presented. Electrical, structural and chemical monitoring of representative parameters is performed by means of RF, DC characterizations and also X-ray diffraction coupled to X-fluorescence to assess aging in microstructures. Results indicate that humidity affects samples stronger than high temperature. From viewpoint of robustness, non-negligible effects of SiO2 mass-loading on antiresonance and resonance frequencies are reported. Drifts of parameters for a lonely resonator and filter transmission are both in good accordance. Finally, the need of a full sheet passivation layer is demonstrated in order to protect metals and Aluminum Nitride (AlN) against oxidation and pollutant compounds respectively