Open AccessFormation of transparent aluminum hydroxide film with mesoscopic surface roughness by hydrothermal treatment of incompletely-nitrided sputtered aluminum film
Author(s) -
T. Hori,
Zhiyong Qiu,
Takashi Ishiguro
Publication year - 2010
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/232/1/012004
Subject(s) - aluminium , materials science , nitriding , surface roughness , metallurgy , hydroxide , mesoscopic physics , surface finish , composite material , chemical engineering , layer (electronics) , physics , quantum mechanics , engineering