Open AccessOff-axis electron holography of Si semiconductors prepared using FIB milling
Author(s) -
David Cooper,
JeanPaul Barnes,
JeanMichel Hartmann,
F. Bertin
Publication year - 2010
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/209/1/012062
Subject(s) - electron holography , materials science , semiconductor , ion milling machine , holography , focused ion beam , electron , optoelectronics , nanotechnology , crystallography , optics , ion , transmission electron microscopy , chemistry , physics , organic chemistry , layer (electronics) , quantum mechanics