Open AccessOptical emission spectroscopy of excited atoms sputtered on a Ti surface under irradiation with multicharged Ar ions
Author(s) -
Kenji Motohashi,
Yoichi Saitoh,
Siniti Kitazawa
Publication year - 2009
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/163/1/012079
Subject(s) - ion , excited state , irradiation , sputtering , spectroscopy , materials science , atomic physics , emission spectrum , wavelength , analytical chemistry (journal) , chemistry , spectral line , thin film , physics , optoelectronics , organic chemistry , quantum mechanics , astronomy , nuclear physics , chromatography , nanotechnology