Selective area oxidation of copper derived from chemical vapor deposited graphene microstructure
Author(s) -
Birong Luo,
Shuai Yang,
Aiheng Yuan,
Bo Zhang,
Dejun Li,
Peter Bøggild,
Timothy J. Booth
Publication year - 2020
Publication title -
nanotechnology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.926
H-Index - 203
eISSN - 1361-6528
pISSN - 0957-4484
DOI - 10.1088/1361-6528/abb26d
Subject(s) - graphene , materials science , chemical vapor deposition , microstructure , copper , coating , isotropic etching , chemical engineering , corrosion , nanotechnology , etching (microfabrication) , metallurgy , layer (electronics) , engineering
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