Open AccessMetallized SU-8 thin film patterns on stretchable PDMS
Author(s) -
Tiffany Baëtens,
Emiliano Pallecchi,
V. Thomy,
S. Arscott
Publication year - 2019
Publication title -
journal of micromechanics and microengineering
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/1361-6439/ab307f
Subject(s) - materials science , polydimethylsiloxane , photoresist , thin film , pdms stamp , substrate (aquarium) , photolithography , microfabrication , optoelectronics , lithography , semiconductor , composite material , electrical resistivity and conductivity , strain engineering , nanotechnology , fabrication , silicon , electrical engineering , layer (electronics) , medicine , oceanography , alternative medicine , engineering , pathology , geology
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