Open AccessFabrication and characterization of double curvature bendable silicon wafers
Author(s) -
Bram Lips,
Robert Puers
Publication year - 2018
Publication title -
journal of micromechanics and microengineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.494
H-Index - 132
eISSN - 1361-6439
pISSN - 0960-1317
DOI - 10.1088/1361-6439/aadbd0
Subject(s) - fabrication , wafer , characterization (materials science) , materials science , curvature , silicon , nanotechnology , optoelectronics , composite material , geometry , alternative medicine , pathology , mathematics , medicine
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