Open AccessFocus on software and semiconductor equipment
Author(s) -
Andreas Mandelis
Publication year - 2015
Publication title -
physics today
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.594
H-Index - 112
eISSN - 1945-0699
pISSN - 0031-9228
DOI - 10.1063/pt.3.2852
Subject(s) - multiphysics , software , computer science , interface (matter) , wafer , embedded system , computer hardware , finite element method , operating system , electrical engineering , engineering , structural engineering , bubble , maximum bubble pressure method
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