Open AccessA micro-thin-film getter–heater unit for high vacuum capsulation of MEMS devices
Author(s) -
Yucheng Ji,
Liuhaodong Feng,
Song Guo,
Xinlin Peng,
Shuo Chen,
Wenbing Li,
Shinan Wang
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/6.0001580
Subject(s) - getter , microelectromechanical systems , materials science , wafer , optoelectronics , substrate (aquarium) , thin film , silicon , nanotechnology , oceanography , geology
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