Model-based image quality optimization for submicron direct laser writing
Author(s) -
Shang Yang,
Libin Zhang,
Yayi Wei
Publication year - 2020
Publication title -
aip advances
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/6.0000595
Subject(s) - microelectronics , laser , quality (philosophy) , distortion (music) , wavelength , image quality , enhanced data rates for gsm evolution , fabrication , computer science , energy (signal processing) , line (geometry) , optics , image (mathematics) , materials science , optoelectronics , mathematics , artificial intelligence , physics , statistics , geometry , medicine , amplifier , alternative medicine , cmos , pathology , quantum mechanics
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