Open AccessDevelopment of a calibration system for wafer-type temperature sensor
Author(s) -
Jongho Kim,
Jihun Mun,
JaeSoo Shin,
SangWoo Kang
Publication year - 2020
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/6.0000536
Subject(s) - wafer , calibration , materials science , temperature measurement , optoelectronics , temperature control , reliability (semiconductor) , semiconductor device fabrication , fabrication , electronic engineering , mechanical engineering , engineering , medicine , power (physics) , statistics , physics , mathematics , alternative medicine , pathology , quantum mechanics
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