Overcoming metal-rich surface chemistry limitations of ScAlN for high electrical performance heterostructures | Zendy

Zachary Engel | Zendy; Keisuke Motoki | Zendy; Christopher M. Matthews | Zendy; W. Alan Doolittle | Zendy

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Overcoming metal-rich surface chemistry limitations of ScAlN for high electrical performance heterostructures

Author(s) -

Zachary Engel,

Keisuke Motoki,

Christopher M. Matthews,

W. Alan Doolittle

Publication year - 2022

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/5.0121621

Subject(s) - heterojunction , molecular beam epitaxy , substrate (aquarium) , epitaxy , surface roughness , high electron mobility transistor , sheet resistance , electron diffraction , optoelectronics , materials science , surface finish , metal , electron mobility , chemistry , transistor , analytical chemistry (journal) , nanotechnology , diffraction , optics , metallurgy , composite material , voltage , geology , oceanography , physics , layer (electronics) , quantum mechanics , chromatography

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