Open AccessDe-carbonization of self-assembled molecular monolayers doping in silicon
Author(s) -
Shannan Chang,
Chufan Zhang,
Kai Li,
Yaping Dan
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0119494
Subject(s) - van der pauw method , dopant , silicon , monolayer , annealing (glass) , doping , carbonization , dopant activation , materials science , substrate (aquarium) , secondary ion mass spectrometry , chemical engineering , carbon fibers , analytical chemistry (journal) , inorganic chemistry , nanotechnology , chemistry , hall effect , electrical resistivity and conductivity , ion , optoelectronics , metallurgy , organic chemistry , scanning electron microscope , composite material , oceanography , geology , composite number , electrical engineering , engineering
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom