Open AccessElimination of remnant phases in low-temperature growth of wurtzite ScAlN by molecular-beam epitaxy
Author(s) -
Brandon Dzuba,
Trang Nguyen,
Amrita Sen,
Rosa E. Diaz,
Megha Dubey,
Mukesh Bachhav,
Janelle P. Wharry,
Michael J. Manfra,
Oana Malis
Publication year - 2022
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0118075
Subject(s) - wurtzite crystal structure , molecular beam epitaxy , lattice constant , alloy , materials science , quantum well , lattice (music) , epitaxy , condensed matter physics , analytical chemistry (journal) , molecular physics , chemistry , optoelectronics , diffraction , optics , nanotechnology , zinc , laser , physics , layer (electronics) , chromatography , acoustics , metallurgy , composite material
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