Open AccessHeat generation in PZT MEMS actuator arrays
Author(s) -
Charalampos Fragkiadakis,
Subramanian Sivaramakrishnan,
Thorsten Schmitz-Kempen,
Peter Mardilovich,
Susan TrolierMcKinstry
Publication year - 2022
Publication title -
applied physics letters
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/5.0114670
Subject(s) - materials science , joule heating , piezoelectricity , waveform , microelectromechanical systems , actuator , hysteresis , vibration , dc bias , amplitude , thermal , optoelectronics , acoustics , voltage , optics , composite material , electrical engineering , condensed matter physics , physics , meteorology , engineering
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