Open AccessImprovement of textured AlCu with Ta underlayer on LiNbO3 substrate
Author(s) -
Hala Achahbar,
Florent Bernard,
E. Courjon,
Nicolas Martin,
Thomas Baron,
Sylvain Ballandras
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0107058
Subject(s) - materials science , microstructure , thin film , grain size , electromigration , substrate (aquarium) , composite material , electrode , deposition (geology) , optoelectronics , physical vapor deposition , lithium niobate , nanotechnology , paleontology , oceanography , chemistry , sediment , biology , geology
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