Open AccessCharacterization of a 2 MHz-radiofrequency-driven magnetically expanding plasma source
Author(s) -
Thanatith Nakul,
Kazunori Takahashi
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0106732
Subject(s) - radio frequency , rf probe , plasma , rf power amplifier , materials science , magnetic field , antenna (radio) , optoelectronics , atomic physics , physics , electrical engineering , amplifier , cmos , quantum mechanics , engineering
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