Improved methods for design of PLD and combinatorial PLD films
Author(s) -
Hogne Lysne,
Thomas Brakstad,
Morten Kildemo,
Turid Worren Reenaas
Publication year - 2022
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0105298
Subject(s) - pulsed laser deposition , materials science , thin film , substrate (aquarium) , deposition (geology) , wafer , porosity , analytical chemistry (journal) , titanium , optoelectronics , nanotechnology , composite material , chemistry , metallurgy , paleontology , oceanography , chromatography , sediment , biology , geology
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