Open AccessSimulation of millimeter-sized microwave plasma discharge generator under various conditions
Author(s) -
Fan Lei,
Yan Xue,
Donglin Liu
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0105035
Subject(s) - atomic physics , microwave , excited state , electron density , electron temperature , multiphysics , electron , plasma , metastability , argon , millimeter , materials science , helium , chemistry , physics , optics , thermodynamics , organic chemistry , quantum mechanics , finite element method
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