Open AccessMulticharged ion processing for targeted nanostructure formation
Author(s) -
E. S. Srinadhu,
Dhruva Kulkarni,
Daniel A. Field,
J.E. Harriss,
C. E. Sosolik
Publication year - 2022
Publication title -
journal of applied physics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0098945
Subject(s) - nanostructure , ion , materials science , sputtering , yield (engineering) , chemical physics , nanotechnology , chemistry , thin film , metallurgy , organic chemistry