Open AccessEffects of a post deposition anneal on a tunneling Al2O3 interlayer for thermally stable MoOx hole selective contacts
Author(s) -
Mike Tang Soo Kiong Ah Sen,
Jimmy Melskens,
A.W. Weeber
Publication year - 2022
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0097779
Subject(s) - passivation , materials science , sputtering , thermal stability , optoelectronics , sputter deposition , atomic layer deposition , deposition (geology) , silicon , quantum tunnelling , layer (electronics) , annealing (glass) , nanotechnology , chemical engineering , thin film , composite material , paleontology , sediment , biology , engineering
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