Open AccessEffects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma
Author(s) -
Kunihiro Kamataki,
Daiki Nagamatsu,
Tao Yang,
Kohei Abe,
Akihiro Yamamoto,
Iori Nagao,
Toshiaki Arima,
Michihiro Otaka,
Yuma Yamamoto,
Daisuke Yamashita,
Takamasa Okumura,
Naoto Yamashita,
Naho Itagaki,
Kazunori Koga,
Masaharu Shiratani
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0097691
Subject(s) - plasma , nanoparticle , rayleigh scattering , levitation , amplitude , atomic physics , oscillation (cell signaling) , materials science , electric field , scattering , chemistry , optics , nanotechnology , physics , biochemistry , quantum mechanics , magnet
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